Operation modes of UNISERS
Our patented technology is the only known surface-enhanced Raman spectroscopy method which can detect all non-volatile impurities regardless of their chemical properties. Therefore, we can analyse multiple different impurities in liquids within the same test.
Our technology is based on sample preparation and Raman scanning. The sample preparation is non-chemical and amplifies the Raman signal of impurities by a factor of ~1,000,000 and makes trace impurities detectable.
We can perform either quick monitoring of total-impurity content of UPW or detailed impurity analysis using Raman scanning.
|Operation mode||Required UPW sample volume||Total analysis time |
|Monitoring||100 – 200|
|10 min||Estimation total impurity content|
|Quick Analysis||200 – 300|
|15 -20 min||Estimation of impurity concentrations|
|Detailed Analysis||1000 – 2000|
|40 – 60 min||Impurity concentrations|
Robustness and high reliability
Analysis of sub-ppb impurities is complex as cross contamination can be multiple order of magnitudes higher than the actual impurity concentration. Our sample preparation is non-chemical and has inherently a low cross contamination. UNISERS provides ultimate reliability by:
- Molecule-specific fingerprint spectral signals (Raman)
- Minimized cross-contamination
- No human-related error
- Self-calibration with multiple impurity monitoring (below figure)
- Improved quantification accuracy
- Characterization of component defectivity for semiconductors equipment
- Quantification of total-silica and critical-carbon in high-purity chemicals
- Characterization of filtration efficiency of membranes
- Semiconductor fabs, semiconductors equipment producers, chemical producers, membrane producers, R&D labs.
Inline monitoring UNISERS
- More detailed information about process liquid quality
- Lower analysis cost
- Monitoring total-silica and critical-carbon in UPW
- Semiconductor fabs
Learn more about the universal surface Enhanced Raman spectroscopy
Raman spectroscopy is a non-destructive and fast analysis technique which is based on the inelastic scattering of photons by the molecular vibrational and rotational bonds. Accurate identification of solvents, powders or plastics is accomplished in various industries using Raman spectrometers. However, low sensitivity restricts its extensive use as a comprehensive chemical analysis tool to address trace impurities in liquids. Surface-enhanced Raman spectroscopy (SERS) is an effective method to address the sensitivity issue of Raman spectroscopy. Using metallic nanostructures, SERS can amplify the Raman signals by orders of magnitude. Such a substantial enhancement has attracted a large number of researchers to this field in the past 40 years. However, the extensive commercialization of SERS has not been realized yet. One of the most significant challenges has been to expand the universe of the analytes that can be detected. In reality, SERS could detect molecules when they have a strong affinity to the metallic surface. If non-binding molecules are intended to be detected, a chemical surface functionalization is necessary. Surface functionalization adds complexity, cost and non-reproducible background signals. It also diminishes the universality of the technology. We recently developed a novel SERS methodology which can improve the sensitivity while preserving the molecular-universality.