Semiconductor industry

Main problem: Defects

A main source of defects is the impurities in process liquids. This problem can be divided into two:

  • Inconsistent liquid quality
  • Insufficient liquid quality

Inconsistency in liquid quality is causing significant financial losses in the industry. A component in the filtration, distribution, storage and dispensing system can contaminate the high-purity liquids. For example, a failure in the hollow-fiber ultrafiltration membrane leads to increased colloidal contamination. A technology is needed to quickly locate and diagnose the reason of contamination source.  

Purification of liquid is a difficult and expensive task. It is important to understand the defectivity of different liquids in order to focus on the biggest source of the defects. In order to compare the defectivity of different liquids, a universal technology is required to analyze different type of liquids (water, acids, solvents) with a universal methodology. 

Our Solution

Combining nanotechnology, Raman spectroscopy and machine learning algorithms, we can fulfil the demanding task for critical impurities (silica and critical-carbon). Nanotechnology assisted sample preparation amplifies the impurity related Raman signals while quenching the background signal (fluorescence). Our methodology does not require chemical reactions; therefore, the risk of cross-contamination is very low. In addition, we can analyze multiple different impurities within the same test. 

UNISERS in Semiconductor industry

ImpurityDetection limitAnalysis time
Silica´╗┐< 50 ppt60 min
Critical carbon´╗┐< 5 ppt60 min

Silica and critical-carbon (non-volatile polar carbon) quantity of ultrapure water needs to be monitored with sub-100 ppt sensitivity. We are the only technology that can monitor these parameters in ultrapure water within the same test. We can improve the sensitivity by simply increasing the sample volume to be analysed. We are currently working to expand the impurity portfolio to include total-conductive impurities, boron and chloride.

Collaborations and partnerships

We are evaluating different options for a market entry in semiconductor industry. We are open for strategic partnerships to leverage our technology with your demand and Know-How.